{"id":4532,"date":"2025-05-15T10:41:11","date_gmt":"2025-05-15T08:41:11","guid":{"rendered":"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/?p=4532"},"modified":"2025-05-22T15:20:17","modified_gmt":"2025-05-22T13:20:17","slug":"graphen-in-der-mikroelektronik-forschung-fuer-die-serienreife","status":"publish","type":"post","link":"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/en\/graphen-in-der-mikroelektronik-forschung-fuer-die-serienreife\/","title":{"rendered":"Graphene in microelectronics &#8211; research for series production"},"content":{"rendered":"<div class=\"twoclick_social_bookmarks_post_4532 social_share_privacy clearfix 1.6.4 locale-en_US sprite-en_US\"><\/div><div class=\"twoclick-js\"><script type=\"text\/javascript\">\/* <![CDATA[ *\/\njQuery(document).ready(function($){if($('.twoclick_social_bookmarks_post_4532')){$('.twoclick_social_bookmarks_post_4532').socialSharePrivacy({\"services\":{\"facebook\":{\"status\":\"on\",\"txt_info\":\"2 Klicks f\\u00fcr mehr Datenschutz: Erst wenn Sie hier klicken, wird der Button aktiv und Sie k\\u00f6nnen Ihre Empfehlung an Facebook senden. Schon beim Aktivieren werden Daten an Dritte \\u00fcbertragen - siehe <em>i<\\\/em>.\",\"perma_option\":\"off\",\"action\":\"recommend\",\"language\":\"en_US\"}},\"txt_help\":\"Wenn Sie diese Felder durch einen Klick aktivieren, werden Informationen an Facebook, Twitter, Flattr, Xing, t3n, LinkedIn, Pinterest oder Google eventuell ins Ausland \\u00fcbertragen und unter Umst\\u00e4nden auch dort gespeichert. N\\u00e4heres erfahren Sie durch einen Klick auf das <em>i<\\\/em>.\",\"settings_perma\":\"Dauerhaft aktivieren und Daten\\u00fcber-tragung zustimmen:\",\"info_link\":\"http:\\\/\\\/www.heise.de\\\/ct\\\/artikel\\\/2-Klicks-fuer-mehr-Datenschutz-1333879.html\",\"uri\":\"https:\\\/\\\/blog.rwth-aachen.de\\\/elektrotechnik\\\/en\\\/graphen-in-der-mikroelektronik-forschung-fuer-die-serienreife\\\/\",\"post_id\":4532,\"post_title_referrer_track\":\"Graphene+in+microelectronics+%26%238211%3B+research+for+series+production\",\"display_infobox\":\"on\"});}});\n\/* ]]> *\/<\/script><\/div><p><div id=\"attachment_4533\" style=\"width: 1040px\" class=\"wp-caption aligncenter\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-4533\" class=\"wp-image-4533 size-full\" src=\"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/files\/2025\/03\/Max_Lemme_\u00a9-Martin-Braun.jpg\" alt=\"A man stands with his arms folded in a light-flooded room.\" width=\"1030\" height=\"687\" srcset=\"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/files\/2025\/03\/Max_Lemme_\u00a9-Martin-Braun.jpg 1030w, https:\/\/blog.rwth-aachen.de\/elektrotechnik\/files\/2025\/03\/Max_Lemme_\u00a9-Martin-Braun-300x200.jpg 300w, https:\/\/blog.rwth-aachen.de\/elektrotechnik\/files\/2025\/03\/Max_Lemme_\u00a9-Martin-Braun-1024x683.jpg 1024w, https:\/\/blog.rwth-aachen.de\/elektrotechnik\/files\/2025\/03\/Max_Lemme_\u00a9-Martin-Braun-768x512.jpg 768w\" sizes=\"auto, (max-width: 1030px) 100vw, 1030px\" \/><p id=\"caption-attachment-4533\" class=\"wp-caption-text\">Professor Max Lemme holds the Chair of Electronic Devices at RWTH Aachen University and is Director of the non-profit research organisation <a href=\"https:\/\/www.amo.de\/en\/\">AMO GmbH<\/a>. \u00a9 Martin Braun<\/p><\/div><\/p>\n<p><span style=\"color: #00549f;\"><strong>As part of the completed European 2D-Experimental Pilot Line (2D-EPL) project, <a href=\"https:\/\/www.amo.de\/en\/\">AMO GmbH<\/a> has realized two multi-project wafer runs for the large-scale production of electronic devices based on graphene.<\/strong><\/span><\/p>\n<p>The discovery of graphene and other two-dimensional materials in 2004 was seen as potentially revolutionary for advances in microelectronics. The material&#8217;s high carrier mobility, broadband optical absorption, low thickness and high mechanical strength have raised great expectations for the use of graphene in electronics, optoelectronics and sensor technology.<\/p>\n<blockquote><p><em>\u2018There are now plenty of publications that show prototypes of devices based on 2D materials with performances significantly beyond the state-of-the-art,\u2019 says Cedric Huyghebaert, technical leader of the 2D-EPL project.<\/em><\/p><\/blockquote>\n<p>However, the semiconductor industry has not yet produced any commercially viable graphene devices. This is due to a number of challenges, including but not limited to graphene growth, graphene transfer and purification. The transition from scientific experiments involving only a small number of graphene devices to real applications based on reliable manufacturing processes for mass production has stagnated.<\/p>\n<p>The 2D-EPL project, which was funded by the European Commission, was a \u20ac20 million initiative that sought to demonstrate the technical feasibility of manufacturing devices based on graphene and other two-dimensional materials on a large scale. The primary objective of this project was to promote market feasibility. In pursuit of this objective, all actors involved in the value chain were convened between October 2020 and September 2024, resulting in the execution of five multi-project wafer (MPW) runs. In addition to the development of process modules at an industrial level, the delivery of graphene-based devices to customers was a further objective. Each of these runs provided universities, research institutes and companies with the opportunity to customise their components on a wafer chip.<\/p>\n<blockquote><p><em>\u2018Our final goal is to demonstrate that it is possible to produce a wide range of devices based on two-dimensional materials in a way that is interesting for industry, and each multi-project wafer run wants to set a milestone in that direction,\u2019 explains Professor Max Lemme, scientific director of AMO GmbH and holder of the <a href=\"https:\/\/www.eld.rwth-aachen.de\/cms\/~psfz\/eld\/?lidx=1\">Chair of Electronic Devices<\/a> at RWTH Aachen University<\/em><\/p><\/blockquote>\n<p>AMO GmbH has successfully executed the inaugural and third multi-project wafer run in a cutting-edge clean room facility. The initial MPW run addressed the definition of graphene field-effect transistors with exposed graphene channels, with a focus on their applications in chemical and biosensor technologies. The subsequent MPW run dealt with the definition of transistors with dielectric encapsulation, which were intended for utilisation in electronic applications. The specified device performance parameters for mobility, charge neutral point, sheet resistance and contact resistivity were measured. Should the target values be realised and the optical microscopic analysis demonstrate acceptable quality with regard to lift-off and etching, the wafer would be deemed ready for delivery. The researchers confirmed the existence of challenges that had previously been identified, including the formation of residue from the resist, which can present difficulties in the context of biosensor applications, given the necessity of a pure graphene surface. Furthermore, there were still unknown problems at the time, such as unexpected customer-specific requirements and their technical realisation, which had to be solved.<\/p>\n<blockquote><p><em>\u2018We consider the wafer runs to be successful because the device yield and performance met or exceeded the initial specifications across the wafers. In addition, all customers were served with little or no delay,<\/em>\u2019 \u00a0reads the <a href=\"https:\/\/www.nature.com\/articles\/s41467-025-56357-0\">scientific article<\/a> presenting the results of the first and third multi-project wafer runs.<\/p><\/blockquote>\n<p>The results of the five multi-project wafer runs form the basis of the follow-up project <a href=\"https:\/\/graphene-flagship.eu\/industrialisation\/pilot-line\/\">2D-Pilot Line<\/a> (2D-PL). The objective of the present pilot line is to further strengthen the European ecosystem in the development of integration modules for photonics and electronics prototyping services. The work is centred on the maturation of semiconductor technologies and the provision of information to support industrial deployment. In this context, comprehensive prototyping services are offered for the integration of 2D materials, such as graphene, on established semiconductor platforms with silicon technologies.<\/p>\n<hr \/>\n<p>The scientific article <a href=\"https:\/\/www.nature.com\/articles\/s41467-025-56357-0\">Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line project<\/a> provides further insights into the multi-project wafer runs one and three.<\/p>\n<p>Further information on the topic can be found on the homepage of the <a href=\"https:\/\/www.eld.rwth-aachen.de\/cms\/eld\/der-lehrstuhl\/~qesv\/ueber-uns\/?lidx=1\">Chair of Electronic Devices<\/a>.<\/p>\n<p>The <a href=\"https:\/\/780207571.flowpaper.com\/GrapheneFlagshipAR2023ScreenSinglePages\/#page=1\">2023 Annual Report of the Graphene Flagship<\/a> provides an overview of the work of the 2D Experimental Pilot Line, presenting the current status of 2D materials research in Europe and new projects.<\/p>\n<p>&nbsp;<\/p>\n<h1 class=\"c-article-title\" data-test=\"article-title\" data-article-title=\"\"><\/h1>\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>As part of the completed European 2D-Experimental Pilot Line (2D-EPL) project, AMO GmbH has realized two multi-project wafer runs for the large-scale production of electronic devices based on graphene. The [&hellip;]<\/p>\n","protected":false},"author":4543,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"c2c_always_allow_admin_comments":false,"footnotes":""},"categories":[1,11],"tags":[449,448,456,455,389,119,385,446,459,454,452,384,458,451,457,453,460,447],"class_list":["post-4532","post","type-post","status-publish","format-standard","hentry","category-allgemein","category-mikro-und-nanoeletronik","tag-2d-epl","tag-2d-experimental-pilot-line","tag-2d-pilot-line","tag-2d-pl","tag-amo","tag-chair-of-electronic-devices","tag-eld","tag-graphen","tag-graphene","tag-graphene-flagship","tag-lehrstuhls-fuer-elektronische-bauelemente","tag-max-lemme","tag-microelectronics","tag-mpl","tag-multi-project-wafer-runs","tag-multi-project-wafer-runs-for-electronic-graphene-devices-in-the-european-2d-experimental-pilot-line-project","tag-multiprojekt-wafer-laeufe","tag-tmdc"],"_links":{"self":[{"href":"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/en\/wp-json\/wp\/v2\/posts\/4532","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/en\/wp-json\/wp\/v2\/users\/4543"}],"replies":[{"embeddable":true,"href":"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/en\/wp-json\/wp\/v2\/comments?post=4532"}],"version-history":[{"count":62,"href":"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/en\/wp-json\/wp\/v2\/posts\/4532\/revisions"}],"predecessor-version":[{"id":4716,"href":"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/en\/wp-json\/wp\/v2\/posts\/4532\/revisions\/4716"}],"wp:attachment":[{"href":"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/en\/wp-json\/wp\/v2\/media?parent=4532"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/en\/wp-json\/wp\/v2\/categories?post=4532"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blog.rwth-aachen.de\/elektrotechnik\/en\/wp-json\/wp\/v2\/tags?post=4532"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}